Projection microscope of large filed of view and high resolution
for Inspection of micro defects in very large scale micro display chip

 Project description

Conventional micro display inspection system has a
limited field of view. The technique is labor intensive and
time consuming. The inspection throughput is crippled by
the capability of the inspection instrument itself.
Commercial projector optics does not meet the image
resolution requirements for defect detection and lacks
quick loading mechanism. The customer is looking for a
cost effective alternative.

    Requirements Summary
  • High resolution image
  • Resolve all the bright field defects
  • Resolve all the dark field defects
  • Easy to load and unload samples
  • Ergonomic
  • Easy to operate
  • Cost effective
  • Low maintenance,
  • Long Lamp life, high intensity

Up: Inspection of micro-
Chip with a large field of
View, high resolution
projection micro-scope

Left low: Inspection chip   
with conventional    
microscope

Right Up : Defects of
micro-display in bright
illumination condition

Right : Projected image of    
of micro-display illuminated
with light source designed
for defect enhancement

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